Infrared spectroscopy and electrical characterization of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1995 Vol. 103; Iss. 1

Infrared spectroscopy and electrical characterization of phosphorus implanted and annealed silicon layers

Antonios Seas, Maria-Elena Eleftheriou, Constantinos Christofides, Charis R. Theocharis
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Volume:
103
Year:
1995
Language:
english
Pages:
10
DOI:
10.1016/0168-583x(95)00583-8
File:
PDF, 709 KB
english, 1995
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