Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 106; Iss. 1-4
Effect of Ge-related mechanical strain on defect and impurity behaviour in ion-implanted silicon
Yu. Suprun-Belevich, L. PalmetshoferVolume:
106
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(95)00715-6
File:
PDF, 476 KB
english, 1995