Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 106; Iss. 1-4
An investigation of dopant gases in plasma immersion ion implantation
Shu Qin, James D. Bernstein, Zhuofan Zhao, Chung Chan, Jiqun Shao, Stuart DenholmVolume:
106
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(95)00779-2
File:
PDF, 469 KB
english, 1995