Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1995 Vol. 106; Iss. 1-4
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Simultaneous mass-analyzed positive and negative low-energy ion beam deposition apparatus
Yuji Horino, Nobuteru Tsubouchi, Kanenaga Fujii, Toshitake Nakata, Toshinori TakagiVolume:
106
Year:
1995
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(95)00783-0
File:
PDF, 435 KB
english, 1995