Atomic level smoothing of CVD diamond films by gas cluster...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 112; Iss. 1-4

Atomic level smoothing of CVD diamond films by gas cluster ion beam etching

Akihisa Yoshida, Masahiro Deguchi, Makoto Kitabatake, Takashi Hirao, Jiro Matsuo, Noriaki Toyoda, Isao Yamada
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Volume:
112
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01007-6
File:
PDF, 479 KB
english, 1996
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