Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 107; Iss. 1-4
Formation of Si nanocrystals by heavy ion irradiation of amorphous SiO films
D. Rodichev, Ph. Lavallard, E. Dooryhée, A. Slaoui, J. Perriere, M. Gandais, Y. WangVolume:
107
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01043-2
File:
PDF, 590 KB
english, 1996