ERD-TOF characterization of silicon-compound multilayer and...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 118; Iss. 1-4

ERD-TOF characterization of silicon-compound multilayer and graded-index optical coatings

S.C. Gujrathi, D. Poitras, J.E. Klemberg-Sapieha, L. Martinu
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Volume:
118
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(95)01117-x
File:
PDF, 596 KB
english, 1996
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