Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 118; Iss. 1-4
Application of NRA/channeling to study He+ implanted waveguides
E.K. Williams, D. Ila, S. Sarkisov, P. Venkateswarlu, D.B. PokerVolume:
118
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(95)01194-3
File:
PDF, 358 KB
english, 1996