Characterization of hydrogenated amorphous silicon prepared...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 112; Iss. 1-4

Characterization of hydrogenated amorphous silicon prepared by ion beam assisted evaporation

N. Hadj Zoubir, H. Rinnert, M. Vergnat, G. Marchal, A. Burneau
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Volume:
112
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01234-6
File:
PDF, 314 KB
english, 1996
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