Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 113; Iss. 1-4
Low-energy 15N implantation in carbon for the synthesis of carbon nitride layers
F. Link, H. Baumann, A. Markwitz, E.F. Krimmel, K. BethgeVolume:
113
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01332-6
File:
PDF, 454 KB
english, 1996