Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 113; Iss. 1-4
Large area ion and plasma beam sources
J. WaldorfVolume:
113
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(95)01359-8
File:
PDF, 826 KB
english, 1996