Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 113; Iss. 1-4
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Application of ion implantation in tooling industry
Christen A. StraedeVolume:
113
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(95)01380-6
File:
PDF, 673 KB
english, 1996