SIMS characterization of thin layers of IR and its...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 113; Iss. 1-4

SIMS characterization of thin layers of IR and its silicides

JoséM. Blanco, JoséJ. Serrano, Javier Jiménez-Leube, Tomás Rodríguez, Miguel Aguilar, Russel Gwilliam
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Volume:
113
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01385-7
File:
PDF, 416 KB
english, 1996
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