Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 113; Iss. 1-4
Damage in semiconductor materials during heavy-ion elastic recoil detection analysis
S.R. Walker, P.N. Johnston, I.F. Bubb, W.B. Stannard, D.N. Jamieson, S.P. Dooley, D.D. Cohen, N. Dytlewski, J.W. MartinVolume:
113
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(95)01398-9
File:
PDF, 510 KB
english, 1996