Influence of plasma density and plasma sheath dynamics on...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 113; Iss. 1-4

Influence of plasma density and plasma sheath dynamics on the ion implantation by plasma immersion technique

H. Bender, J. Brutscher, W. Ensinger, R. Günzel, J. Halder, H. Klein, B. Rauschenbach, J. Schäfer, B. Seiler, R. Thomae
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Volume:
113
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01414-4
File:
PDF, 378 KB
english, 1996
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