Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 113; Iss. 1-4
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Alpha backscattering used in stoichiometry determination of thin SiC coatings on Si(100) wafers
R. Somatri, J.F. Chailan, A. Chevarier, N. Chevarier, G. Ferro, Y. Monteil, H. Vincent, J. BouixVolume:
113
Year:
1996
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(95)01416-0
File:
PDF, 580 KB
english, 1996