Microstructure and ion beam characterization of...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1996 Vol. 118; Iss. 1-4

Microstructure and ion beam characterization of heteroepitaxial Si1−x−yGexCy

Harald Jacobsson, Peihua Ye, Nicole Herbots, Sean Hearne, Joan Xiang
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Volume:
118
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(95)01463-2
File:
PDF, 737 KB
english, 1996
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