Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 115; Iss. 1-4
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The effect of the fibre target structure on the spatial distributions of sputtered atoms
W. Eckstein, E.S. Mashkova, V.A. Molchanov, A.I. TolmachevVolume:
115
Year:
1996
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(95)01560-4
File:
PDF, 326 KB
english, 1996