Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 116; Iss. 1-4
Anomalous depth profiles and diffusional behavior of noble gases implanted into photoresist films
J.R. Kaschny, M. BeharVolume:
116
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(96)00038-9
File:
PDF, 509 KB
english, 1996