Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 118; Iss. 1-4
Application of medium energy nuclear microprobe to semiconductor process steps
Mikio Takai, Takehisa Kishimoto, Ryou Mimura, Hiroshi Sawaragi, Ryuso AiharaVolume:
118
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(96)00250-9
File:
PDF, 422 KB
english, 1996