Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 118; Iss. 1-4
Composition analysis of ECR-grown SiO2 and SiOxFy films
J.H. Burkhart, D. Denison, J.C. Barbour, C.A. ApblettVolume:
118
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(96)00255-8
File:
PDF, 455 KB
english, 1996