Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1996 Vol. 119; Iss. 3
Angular distribution of sputtered Ge atoms by low keV Ar+ and Ne+ ion bombardment
T.K. Chini, M. Tanemura, F. OkuyamaVolume:
119
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(96)00366-7
File:
PDF, 445 KB
english, 1996