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Effect of impurities on the grain growth of chemical vapor deposited polycrystalline silicon films
R. Angelucci, M. Severi, S. SolmiVolume:
9
Year:
1983
Language:
english
Pages:
11
DOI:
10.1016/0254-0584(82)90022-0
File:
PDF, 546 KB
english, 1983