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Seminar on metal-organic and plasma assisted chemical vapour deposition for semiconductor applications : February 9–11,1987, Ocean resort and conference centre, deerfield beach, FL(U.S.A.)
Sumner P. WolskyVolume:
15
Year:
1986
Language:
english
DOI:
10.1016/0254-0584(86)90064-7
File:
PDF, 65 KB
english, 1986