Microcrystalline silicon deposited by glow discharge...

Materials Chemistry and Physics 1992 Vol. 32; Iss. 3

Microcrystalline silicon deposited by glow discharge decomposition of heavily diluted silane

Chou Jenq-Shiuh, Sah Wen-Jyh, Lee Si-Chen, Chang T'ien-Chih, Wang Jon-Ching
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Volume:
32
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0254-0584(92)90211-p
File:
PDF, 1.32 MB
english, 1992
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