Hydrogen analysis in hydrogenated amorphous silicon thin films produced by d.c. reactive magnetron sputtering
N. Ababou, N. Beldi, T. Mohammed-BrahimVolume:
33
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0254-0584(93)90066-u
File:
PDF, 453 KB
english, 1993