High-performance small-track-width metal-in-gap heads made...

High-performance small-track-width metal-in-gap heads made by reactive-ion etching

C.W.M.P. Sillen, J.J.M. Ruigrok, M.G.J. Vepřek-Heijman, A.J.G. Bode-Fassbender, J.B. Giesbers
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Volume:
83
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0304-8853(90)90426-q
File:
PDF, 216 KB
english, 1990
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