Ellipsometry of magnetron sputtered thin films of Ni, Si,...

Journal of Magnetism and Magnetic Materials 1992 Vol. 113; Iss. 1-3

Ellipsometry of magnetron sputtered thin films of Ni, Si, AlN and Ni based multilayers

Petr Široký, Jaroslav Sobota, Lubomír Jastrabík
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Volume:
113
Year:
1992
Language:
english
Pages:
7
DOI:
10.1016/0304-8853(92)91248-r
File:
PDF, 669 KB
english, 1992
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