SU-8 as a structural material for labs-on-chips and microelectromechanical systems
Patrick Abgrall, Veronique Conedera, Henri Camon, Anne-Marie Gue, Nam-Trung NguyenVolume:
28
Year:
2007
Language:
english
Pages:
13
DOI:
10.1002/elps.200700333
File:
PDF, 592 KB
english, 2007