Physical properties of a planar magnetron glow discharge

Physical properties of a planar magnetron glow discharge

Ketan Trivedi, Stephen Brewer, Lori McCaig, Norman Sesi, Richard Sacks
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Volume:
46
Year:
1991
Language:
english
Pages:
14
DOI:
10.1016/0584-8547(91)80025-x
File:
PDF, 1.12 MB
english, 1991
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