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Application of a tuned Langmuir probe for the diagnostic study of radio frequency glow discharges: instrumentation and theory
Yuancai Ye, R.Kenneth MarcusVolume:
50
Year:
1995
Language:
english
Pages:
14
DOI:
10.1016/0584-8547(95)01321-5
File:
PDF, 875 KB
english, 1995