![](/img/cover-not-exists.png)
Langmuir probe study of the charged particle characteristics in an analytical radio frequency-glow discharge. Roles of discharge conditions and sample conductivity
Yuancai Ye, R.Kenneth MarcusVolume:
51
Year:
1996
Language:
english
Pages:
23
DOI:
10.1016/0584-8547(95)01433-0
File:
PDF, 1.52 MB
english, 1996