Langmuir probe study of the charged particle...

Langmuir probe study of the charged particle characteristics in an analytical radio frequency-glow discharge. Roles of discharge conditions and sample conductivity

Yuancai Ye, R.Kenneth Marcus
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Volume:
51
Year:
1996
Language:
english
Pages:
23
DOI:
10.1016/0584-8547(95)01433-0
File:
PDF, 1.52 MB
english, 1996
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