Hard and soft micromachining for BioMEMS: review of...

Advanced Drug Delivery Reviews 2004 Vol. 56; Iss. 2

Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery

Babak Ziaie, Antonio Baldi, Ming Lei, Yuandong Gu, Ronald A Siegel
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Volume:
56
Year:
2004
Language:
english
Pages:
28
DOI:
10.1016/j.addr.2003.09.001
File:
PDF, 2.07 MB
english, 2004
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