E–H mode transition in inductively coupled plasma using Ar,...

Current Applied Physics 2011 Vol. 11; Iss. 5-supp-S

E–H mode transition in inductively coupled plasma using Ar, O2, N2, and mixture gas

Jung-Kyu Lee, Hyo-Chang Lee, Chin-Wook Chung
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Volume:
11
Year:
2011
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2011.04.009
File:
PDF, 972 KB
english, 2011
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