Carbon contamination of EUV mask and its effect on CD performance
Sangsul Lee, Jong Gul Doh, Jae Uk Lee, Inhwan Lee, Chang Young Jeong, Dong Gun Lee, Seung-yu Rah, Jinho AhnVolume:
11
Year:
2011
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2011.07.019
File:
PDF, 1.02 MB
english, 2011