Atomic layer etching of graphene for full graphene device...

Carbon 2012 Vol. 50; Iss. 2

Atomic layer etching of graphene for full graphene device fabrication

Woong Sun Lim, Yi Yeon Kim, Hyeongkeun Kim, Sukjae Jang, Namyong Kwon, Beyoung Jae Park, Jong-Hyun Ahn, Ilsub Chung, Byung Hee Hong, Geun Young Yeom
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Volume:
50
Year:
2012
Language:
english
Pages:
7
DOI:
10.1016/j.carbon.2011.08.058
File:
PDF, 984 KB
english, 2012
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