Fluorine functionalization of epitaxial graphene for...

Carbon 2012 Vol. 50; Iss. 6

Fluorine functionalization of epitaxial graphene for uniform deposition of thin high-κ dielectrics

Virginia Wheeler, Nelson Garces, Luke Nyakiti, Rachael Myers-Ward, Glenn Jernigan, James Culbertson, Charles Eddy Jr., D. Kurt Gaskill
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Volume:
50
Year:
2012
Language:
english
Pages:
8
DOI:
10.1016/j.carbon.2012.01.050
File:
PDF, 1.15 MB
english, 2012
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