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Dielectric properties of composition spread SiO2–Al2O3 mixed phase thin films deposited at room temperature by off-axis RF magnetron sputtering
Yun Hoe Kim, Dong Wook Shin, Jin Sang Kim, Jong-Han Song, Seok-Jin Yoon, Kyung Bong Park, Ji-Won ChoiVolume:
38
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.ceramint.2011.04.054
File:
PDF, 738 KB
english, 2012