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Effect of plasma source power on the nanocrystallization of silicon thin films by reactive particle beam assisted chemical vapor deposition
Sun Gyu Choi, Hyung-Ho Park, Jin-Nyoung Jang, MunPyo Hong, Kwang-Ho KwonVolume:
38
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.ceramint.2011.05.116
File:
PDF, 620 KB
english, 2012