![](/img/cover-not-exists.png)
Study on shop floor control system in semiconductor fabrication by self-organizing map-based intelligent multi-controller
Yeou-Ren Shiue, Ruey-Shiang Guh, Tsung-Yuan TsengVolume:
62
Year:
2012
Language:
english
Pages:
11
DOI:
10.1016/j.cie.2012.01.004
File:
PDF, 654 KB
english, 2012