Role of interparticle forces during stress-induced...

Colloids and Surfaces A: Physicochemical and Engineering Aspects 2011 Vol. 389; Iss. 1-3

Role of interparticle forces during stress-induced agglomeration of CMP slurries

Feng-Chi Chang, Purushottam Kumar, Rohit Singh, Kannan Balasundaram, Jaeseok Lee, Jinhyung Lee, Rajiv K. Singh
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Volume:
389
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.colsurfa.2011.09.001
File:
PDF, 607 KB
english, 2011
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