![](/img/cover-not-exists.png)
A novel optimization method to automated wet-etch station scheduling in semiconductor manufacturing systems
Adrián M. Aguirre, Carlos A. Méndez, Pedro M. CastroVolume:
35
Year:
2011
Language:
english
Pages:
13
DOI:
10.1016/j.compchemeng.2011.02.014
File:
PDF, 1.79 MB
english, 2011