Assessment of fire protection performance of water mist applied in exhaust ducts for semiconductor fabrication process
Yi-Liang Shu, Wei-Jin Jeng, Chen-Wei Chiu, Chiun-Hsun ChenVolume:
29
Year:
2005
Language:
english
Pages:
8
DOI:
10.1002/fam.890
File:
PDF, 250 KB
english, 2005