Ultra low-k property of hydrogenated carbon nitride:...

Chemical Physics Letters 2012 Vol. 524; Iss. none

Ultra low-k property of hydrogenated carbon nitride: Chemical evaluation

Abhijit Majumdar, Sadhan Chandra Das, Thoudinja Shripathi, Rainer Hippler
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Volume:
524
Year:
2012
Language:
english
Pages:
6
DOI:
10.1016/j.cplett.2011.12.054
File:
PDF, 755 KB
english, 2012
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