Selective surface patterning with electric discharge

Selective surface patterning with electric discharge

N. Suni, M. Haapala, A. Mäkinen, L. Sainiemi, S. Franssila, E. Färm, E. Puukilainen, M. Ritala, J. Yli-Kauhaluoma, R. Kostiainen
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Volume:
34
Year:
2008
Language:
english
Pages:
1
DOI:
10.1016/j.ejps.2008.02.104
File:
PDF, 53 KB
english, 2008
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