Transmission measurement of three-dimension profile based...

Transmission measurement of three-dimension profile based on infrared-light interference technology with wafer compensation

Xinquan Jiao, Xiujian Chou, Kangkang Niu, Yi Liu, Chenyang Xue, Wendong Zhang
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Volume:
122
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.ijleo.2010.10.045
File:
PDF, 442 KB
english, 2011
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