Highly accurate film thickness measurement based on...

Optik - International Journal for Light and Electron Optics 2012 Vol. 123; Iss. 16

Highly accurate film thickness measurement based on automatic fringe analysis

D.G. Abdelsalam, Byung Joon Baek, F. Abdel-Aziz, Won Chegal, Daesuk Kim
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Volume:
123
Year:
2012
Language:
english
Pages:
1
DOI:
10.1016/j.ijleo.2011.07.065
File:
PDF, 1.07 MB
english, 2012
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