The microstructure of CVD κ-Al2O3 multilayers separated by thin intermediate TiN or TiC layers
M. Halvarsson, J.E. Trancik, S. RuppiVolume:
24
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.ijrmhm.2005.06.007
File:
PDF, 608 KB
english, 2006