Nanotribology-based novel characterization techniques for...

Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force–distance curve measurements

Usama Zaghloul, Bharat Bhushan, George Papaioannou, Fabio Coccetti, Patrick Pons, Robert Plana
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
365
Year:
2012
Language:
english
Pages:
18
DOI:
10.1016/j.jcis.2011.08.005
File:
PDF, 2.67 MB
english, 2012
Conversion to is in progress
Conversion to is failed