Nanotribology-based novel characterization techniques for the dielectric charging failure mechanism in electrostatically actuated NEMS/MEMS devices using force–distance curve measurements
Usama Zaghloul, Bharat Bhushan, George Papaioannou, Fabio Coccetti, Patrick Pons, Robert PlanaVolume:
365
Year:
2012
Language:
english
Pages:
18
DOI:
10.1016/j.jcis.2011.08.005
File:
PDF, 2.67 MB
english, 2012