Erosion of tungsten-doped amorphous carbon films in oxygen...

Journal of Nuclear Materials 2012 Vol. 420; Iss. 1-3

Erosion of tungsten-doped amorphous carbon films in oxygen plasma

P. Wang, W. Jacob, M. Balden, A. Manhard, T. Schwarz-Selinger
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Volume:
420
Year:
2012
Language:
english
Pages:
9
DOI:
10.1016/j.jnucmat.2011.09.023
File:
PDF, 1.06 MB
english, 2012
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